Ultra-Small, High-Frequency, and Substrate-Immune Microtube Inductors Transformed from 2D to 3D.

ABSTRACT: Monolithic on-chip inductors are key passive devices in radio frequency integrated circuits (RFICs). Currently, 70-80% of the on-wafer area of most RFIC chips is occupied by the sprawling planar spiral inductors, and its operation frequency is limited to a few GHz. With continuous scaling of the transistor technology, miniaturization and high frequency operation of inductors have become the bottleneck to meet future demands of wireless communication systems. Here we report on-chip self-rolled-up 3D microtube inductors with extremely small footprint, unprecedented high frequency performance and weak dependence on substrate conductivity. The serpentine metal strips are deposited on an oppositely strained silicon nitrides (SiNx) bilayer. After releasing from the sacrificial layer underneath,

SUBMITTER: Yu X 

PROVIDER: S-EPMC5386192 | biostudies-literature | 2015 Apr

REPOSITORIES: biostudies-literature