Fluorocarbon Thin Films Fabricated using Carbon Nanotube/Polytetrafluoroethylene Composite Polymer Targets via Mid-Frequency Sputtering.

ABSTRACT: Carbon nanotube/polytetrafluoroethylene composite polymer targets are proposed for use in the fabrication of fluorocarbon thin films using the mid-frequency sputtering process. Fluorocarbon thin films deposited using carbon nanotube/polytetrafluoroethylene composite targets exhibit an amorphous phase with a smooth surface and show a high water contact angle, optical transmittance, and surface hardness. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy studies reveal that as the carbon nanotube concentration increased in the composite target, a carbon cross-linked structure was formed, which enhanced the film hardness and the modulus of the fluorocarbon thin film. Large-area fluorocarbon thin films with a substrate width of 700 mm were successfully fabricated by a

SUBMITTER: Kim SH 

PROVIDER: S-EPMC5431166 | biostudies-literature | 2017 May

REPOSITORIES: biostudies-literature