Ultrahigh-Q optomechanical crystal cavities fabricated in a CMOS foundry.

ABSTRACT: Photonic crystals use periodic structures to create frequency regions where the optical wave propagation is forbidden, which allows the creation and integration of complex optical functionalities in small footprint devices. Such strategy has also been successfully applied to confine mechanical waves and to explore their interaction with light in the so-called optomechanical cavities. Because of their challenging design, these cavities are traditionally fabricated using dedicated high-resolution electron-beam lithography tools that are inherently slow, limiting this solution to small-scale or research applications. Here we show how to overcome this problem by using a deep-UV photolithography process to fabricate optomechanical crystals in a commercial CMOS foundry. We show that a careful de

SUBMITTER: Benevides R 

PROVIDER: S-EPMC5449385 | biostudies-literature | 2017 May

REPOSITORIES: biostudies-literature