Micro-thermocouple on nano-membrane: thermometer for nanoscale measurements.

ABSTRACT: A thermocouple of Au-Ni with only 2.5-μm-wide electrodes on a 30-nm-thick Si₃N₄ membrane was fabricated by a simple low-resolution electron beam lithography and lift off procedure. The thermocouple is shown to be sensitive to heat generated by laser as well as an electron beam. Nano-thin membrane was used to reach a high spatial resolution of energy deposition and to realise a heat source of sub-1 μm diameter. This was achieved due to a limited generation of secondary electrons, which increase a lateral energy deposition. A low thermal capacitance of the fabricated devices is useful for the real time monitoring of small and fast temperature changes, e.g., due to convection, and can be detected through an optical and mechanical barrier of the nano-thin membrane. Temper

SUBMITTER: Balcytis A 

PROVIDER: S-EPMC5910443 | biostudies-literature | 2018 Apr

REPOSITORIES: biostudies-literature