Large-scale fabrication of free-standing and sub-μm PDMS through-hole membranes.

ABSTRACT: Free-standing polydimethylsiloxane (PDMS) through-hole membranes have been studied extensively in recent years for chemical and biomedical applications. However, robust fabrication of such membranes with sub-μm through-holes, and at a sub-μm thickness over large areas is challenging. In this paper, we report a robust and simple method for large-scale fabrication of free-standing and sub-μm PDMS through-hole membranes, combining soft-lithography with reactive plasma etching techniques. First, arrays of sub-μm photoresist (PR) columns were patterned on another spin-coated sacrificial PR layer, using conventional photolithography processes. Subsequently, a solution of PDMS : hexane at a 1 : 10 ratio was spin-coated over these fabricated arrays. The cured PDMS membrane was etched in a plasma m

SUBMITTER: Le-The H 

PROVIDER: S-EPMC5944386 | biostudies-literature | 2018 Apr

REPOSITORIES: biostudies-literature