Optically-Monitored Nanopore Fabrication Using a Focused Laser Beam.

ABSTRACT: Solid-state nanopores (ssNPs) are extremely versatile single-molecule sensors and their potential have been established in numerous biomedical applications. However, the fabrication of ssNPs remains the main bottleneck to their widespread use. Herein, we introduce a rapid and localizable ssNPs fabrication method based on feedback-controlled optical etching. We show that a focused blue laser beam irreversibly etches silicon nitride (SiN_x) membranes in solution. Furthermore, photoluminescence (PL) emitted from the SiN_x is used to monitor the etching process in real-time, hence permitting rate adjustment. Transmission electron microscopy (TEM) images of the etched area reveal an inverted Gaussian thickness profile, corresponding to the intensity point spread function of

SUBMITTER: Gilboa T 

PROVIDER: S-EPMC6021433 | biostudies-literature | 2018 Jun

REPOSITORIES: biostudies-literature