Thin film transfer for the fabrication of tantalum nitride photoelectrodes with controllable layered structures for water splitting.

ABSTRACT: The fabrication of semiconductor films on conductive substrates is vital to the production of high-performance electrodes for photoelectrochemical (PEC) water splitting. In this work, a thin film transfer method was developed to produce Ta₃N₅ film photoanodes for PEC water oxidation. Phase-pure Ta₃N₅ thin films were formed on inert Si substrates via magnetron sputtering of Ta films, followed by oxidation and subsequent nitridation in a flow of gaseous NH₃. The resulting porous Ta₃N₅ films were uniformly transferred from the Si substrates using metallic layers that allowed ohmic contact at the Ta₃N₅ film/metal interface. This film transfer method enables control over the film thicknesse

SUBMITTER: Wang C 

PROVIDER: S-EPMC6021777 | biostudies-literature | 2016 Sep

REPOSITORIES: biostudies-literature