Electron heating in rf capacitive discharges at atmospheric-to-subatmospheric pressures.

ABSTRACT: Electron heating is a fundamental and multidisciplinary phenomenon in partially ionized gases, from the planet's ionosphere to laboratory-scale plasmas. Plasmas produced at ambient or reduced pressures have recently shown potential for scientific and industrial applications. However, electron heating, which is strongly coupled to the physicochemical properties of these plasmas, has been poorly understood. We experimentally found the rapid structural transition from non-local to local electron heating in collisional radio-frequency discharges at atmospheric-to-subatmospheric pressures. As the gas pressure decreased from 760 to 200 Torr, the time-averaged electron density increased from 1.3 × 10¹² to 1.3 × 10¹³ cm^-3, and the electron temperature decreased fro

SUBMITTER: Park S 

PROVIDER: S-EPMC6033924 | biostudies-literature | 2018 Jul

REPOSITORIES: biostudies-literature