Developing a MEMS Device with Built-in Microfluidics for Biophysical Single Cell Characterization.

ABSTRACT: This study combines the high-throughput capabilities of microfluidics with the sensitive measurements of microelectromechanical systems (MEMS) technology to perform biophysical characterization of circulating cells for diagnostic purposes. The proposed device includes a built-in microchannel that is probed by two opposing tips performing compression and sensing separately. Mechanical displacement of the compressing tip (up to a maximum of 14 µm) and the sensing tip (with a quality factor of 8.9) are provided by two separate comb-drive actuators, and sensing is performed with a capacitive displacement sensor. The device is designed and developed for simultaneous electrical and mechanical measurements. As the device is capable of exchanging the liquid inside the channel, different solutions

SUBMITTER: Takayama Y 

PROVIDER: S-EPMC6187549 | biostudies-literature | 2018 Jun

REPOSITORIES: biostudies-literature