Wide Linearity Range and Highly Sensitive MEMS-Based Micro-Fluxgate Sensor with Double-Layer Magnetic Core Made of Fe⁻Co⁻B Amorphous Alloy.

ABSTRACT: This paper reports a novel micro-fluxgate sensor based on a double-layer magnetic core of a Fe⁻Co⁻B-based amorphous ribbon. The melt-spinning technique was carried out to obtain a Fe⁻Co⁻B-based amorphous ribbon composite of Fe_58.1Co_24.9B₁₆Si₁, and the obtained amorphous ribbon was then annealed at 595 K for 1 h to benefit soft magnetic properties. The prepared ribbon showed excellent soft magnetic behavior with a high saturated magnetic intensity (B_s) of 1.74 T and a coercivity (H_c) of less than 0.2 Oe. Afterward, a micro-fluxgate sensor based on the prepared amorphous ribbon was fabricated via microelectromechanical systems (MEMS) technology combined with chemical wet etching. The resulting sensor exhibited a sensitivity of 1985 V/T,

SUBMITTER: Guo L 

PROVIDER: S-EPMC6187929 | biostudies-literature | 2017 Nov

REPOSITORIES: biostudies-literature