A Highly Sensitive Humidity Sensor Based on Ultrahigh-Frequency Microelectromechanical Resonator Coated with Nano-Assembled Polyelectrolyte Thin Films

ABSTRACT: We developed a highly sensitive humidity sensor based on the combination of ultrahigh-frequency film bulk acoustic resonator (FBAR) and nano-assembled polyelectrolyte (PET) thin films. The water molecule absorption efficiency was optimized by forming loosely-packed PET nanostructures. Then, the humidity sensing characteristics were analyzed in terms of sensitivity, linearity, reversibility, stability and detection limit. As a result, PET-coated FBAR exhibits excellent humidity sensitivity of 2202.20 Hz/ppm, which is five orders of magnitude higher than quartz crystal microbalance (QCM). Additionally, temperature dependence was investigated with the result that PET-coated FBAR possessed a higher sensitivity at low temperature. Furthermore, we realized the selective detection of water vapor

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PROVIDER: S-EPMC6189836 | biostudies-literature | 2017 Apr

REPOSITORIES: biostudies-literature