A Simple Extraction Method of Young's Modulus for Multilayer Films in MEMS Applications.

ABSTRACT: Based on the first resonance frequency measurement of multilayer beams, a simple extraction method has been developed to extract the Young's modulus of individual layers. To verify this method, the double-layer cantilever, as a typical example, is analyzed to simplify the situation and finite element modeling (FEM) is used in consideration of the buckling and unbuckling situation of cantilevers. The first resonance frequencies, which are obtained by ANSYS (15.0, ANSYS Inc., Pittsburgh, PA, USA) with a group of thirteen setting values of Young's modulus in the polysilicon layer are brought into the theoretical formulas to obtain a new group of Young's modulus in the polysilicon layer. The reliability and feasibility of the theoretical method are confirmed, according to the slight difference

SUBMITTER: Guo XG 

PROVIDER: S-EPMC6190058 | biostudies-literature | 2017 Jun

REPOSITORIES: biostudies-literature