Engineering polymer MEMS using combined microfluidic pervaporation and micro-molding.

ABSTRACT: In view of the extensive increase of flexible devices and wearable electronics, the development of polymer micro-electro-mechanical systems (MEMS) is becoming more and more important since their potential to meet the multiple needs for sensing applications in flexible electronics is now clearly established. Nevertheless, polymer micromachining for MEMS applications is not yet as mature as its silicon counterpart, and innovative microfabrication techniques are still expected. We show in the present work an emerging and versatile microfabrication method to produce arbitrary organic, spatially resolved multilayer micro-structures, starting from dilute inks, and with possibly a large choice of materials. This approach consists in extending classical microfluidic pervaporation combined w

SUBMITTER: Thuau D 

PROVIDER: S-EPMC6220165 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature