Flexible polyimide-based hybrid opto-electric neural interface with 16 channels of micro-LEDs and electrodes.

ABSTRACT: In this paper, a polyimide-based flexible device that integrates 16 micro-LEDs and 16 IrO _x -modified microelectrodes for synchronous photostimulation and neural signal recording is presented. The 4 × 4 micro-LEDs (dimensions of 220 × 270 × 50 μm³, 700 μm pitch) are fixed in the SU-8 fence structure on a polyimide substrate and connected to the leads via a wire-bonding method. The recording electrodes share a similar fabrication process on the polyimide with 16 microelectrode sites (200 μm in diameter and 700 μm in pitch) modified by iridium oxide (IrO _x ). These two subparts can be aligned with alignment holes and glued back-to-back by epoxy, which ensures that the light from the LEDs passes through the corresponding holes that are evenly dis

SUBMITTER: Ji B 

PROVIDER: S-EPMC6220173 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature