A power supply module for autonomous portable electronics: ultralow-frequency MEMS electrostatic kinetic energy harvester with a comb structure reducing air damping.

ABSTRACT: A MEMS electrostatic kinetic energy harvester (e-KEH) of about 1 cm², working at ultralow frequency (1-20 Hz), without any supported additional mass on its mobile electrode, and working even without a vacuum environment is reported. The prototype is especially suitable for environments with abundant low frequency motions such as wearable electronics. The proposed e-KEH consists of a capacitor with a finger-teeth interdigited comb structure. This greatly reduces the air damping effect, and thus the capacitance variation remains important regardless of the presence of air. With the new design, the energy transduced per cycle of excitation is no less than 33 times higher than the classic design within 10-40 Hz/2 g _peak, while is 85 times higher at 15 Hz/2 g

SUBMITTER: Lu Y 

PROVIDER: S-EPMC6220193 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature