Tape nanolithography: a rapid and simple method for fabricating flexible, wearable nanophotonic devices.

ABSTRACT: This paper describes a tape nanolithography method for the rapid and economical manufacturing of flexible, wearable nanophotonic devices. This method involves the soft lithography of a donor substrate with air-void nanopatterns, subsequent deposition of materials onto the substrate surface, followed by direct taping and peeling of the deposited materials by an adhesive tape. Without using any sophisticated techniques, the nanopatterns, which are preformed on the surface of the donor substrate, automatically emerge in the deposited materials. The nanopatterns can then be transferred to the tape surface. By leveraging the works of adhesion at the interfaces of the donor substrate-deposited material-tape assembly, this method not only demonstrates sub-hundred-nanometer resolution in the trans

SUBMITTER: Wang Q 

PROVIDER: S-EPMC6220255 | biostudies-literature | 2018

REPOSITORIES: biostudies-literature