Three-Dimensional Electrochemical Axial Lithography on Si Micro- and Nanowire Arrays.

ABSTRACT: A templated electrochemical technique for patterning macroscopic arrays of single-crystalline Si micro- and nanowires with feature dimensions down to 5 nm is reported. This technique, termed three-dimensional electrochemical axial lithography (3DEAL), allows the design and parallel fabrication of hybrid silicon nanowire arrays decorated with complex metal nano-ring architectures in a flexible and modular approach. While conventional templated approaches are based on the direct replication of a template, our method can be used to perform high-resolution lithography on pre-existing nanostructures. This is made possible by the synthesis of a porous template with tunable dimensions that guides the deposition of well-defined metallic shells around the Si wires. The synthesis of a variety of rin

SUBMITTER: Wendisch FJ 

PROVIDER: S-EPMC6238956 | biostudies-literature | 2018 Nov

REPOSITORIES: biostudies-literature