Composite GaN-C-Ga ("GaCN") Layers with Tunable Refractive Index.

ABSTRACT: This article describes novel composite thin films consisting of GaN, C, and Ga (termed "GaCN", as an analogue to BCN and other carbonitrides) as a prospective material for future optical applications. This is due to their tunable refractive index that depends on the carbon content. The composites are prepared by introducing alternating pulses of trimethylgallium (TMG) and ammonia (NH₃) on silicon substrates to mimic an atomic layer deposition process. Because the GaCN material is hardly reported to the best of our knowledge, a comprehensive characterization is performed to investigate into its chemical nature, primarily to determine whether or not it exists as a single-phase material. It is revealed that GaCN is a composite, consisting of phase-segregated, nanoscale clusters of

SUBMITTER: Banerjee S 

PROVIDER: S-EPMC6311680 | biostudies-literature | 2018 Dec

REPOSITORIES: biostudies-literature