A Miniature Resonant and Torsional Magnetometer Based on Lorentz Force.

ABSTRACT: A microelectromechanical system (MEMS) torsional resonant magnetometer based on Lorentz force was investigated, consisting of torsional structures, torsional beams, metal plates, a coil, and a glass substrate. The Lorentz force, introduced by the interaction between the current in the MEMS coil and an external horizontal magnetic field, leads to displacement of the torsional structure. The strength of the magnetic field is proportional to this displacement, and can be detected with two sensing capacitors fabricated on the torsion structure and the substrate. To improve sensor sensitivity, a folded torsional beam and a double-layer excitation coil were introduced. The fabrication processes included lift-off, anodic bonding, chemical mechanical planarization, silicon nitride (SiNx) depositio

SUBMITTER: Wu L 

PROVIDER: S-EPMC6316825 | biostudies-literature | 2018 Dec

REPOSITORIES: biostudies-literature