Crystallisation Phenomena of In₂O₃:H Films.

ABSTRACT: The crystallisation of sputter-deposited, amorphous In₂O₃:H films was investigated. The influence of deposition and crystallisation parameters onto crystallinity and electron hall mobility was explored. Significant precipitation of metallic indium was discovered in the crystallised films by electron energy loss spectroscopy. Melting of metallic indium at ~160 °C was suggested to promote primary crystallisation of the amorphous In₂O₃:H films. The presence of hydroxyl was ascribed to be responsible for the recrystallization and grain growth accompanying the inter-grain In-O-In bounding. Metallic indium was suggested to provide an excess of free electrons in as-deposited In₂O₃ and In₂O₃:H films. According to the ultraviolet photoelectron spectroscopy, the work function of In₂O₃:H increased du

SUBMITTER: Muydinov R 

PROVIDER: S-EPMC6356562 | biostudies-literature | 2019 Jan

REPOSITORIES: biostudies-literature