Additive manufacturing of patterned 2D semiconductor through recyclable masked growth.

ABSTRACT: The 2D van der Waals crystals have shown great promise as potential future electronic materials due to their atomically thin and smooth nature, highly tailorable electronic structure, and mass production compatibility through chemical synthesis. Electronic devices, such as field effect transistors (FETs), from these materials require patterning and fabrication into desired structures. Specifically, the scale up and future development of "2D"-based electronics will inevitably require large numbers of fabrication steps in the patterning of 2D semiconductors, such as transition metal dichalcogenides (TMDs). This is currently carried out via multiple steps of lithography, etching, and transfer. As 2D devices become more complex (e.g., numerous 2D materials, more layers, specific shapes, etc.),

SUBMITTER: Guo Y 

PROVIDER: S-EPMC6397508 | biostudies-literature | 2019 Feb

REPOSITORIES: biostudies-literature