Metal Oxide Thin Films Prepared by Magnetron Sputtering Technology for Volatile Organic Compound Detection in the Microwave Frequency Range.

ABSTRACT: Metal oxide thin films such as copper oxide, titanium dioxide, and tin dioxide deposited by magnetron sputtering technology were verified as a gas-sensitive layer in microwave-based gas sensors operated at 2.4 GHz. The developed gas sensors were tested at room temperature (23 °C) and 50% relative humidity (RH) under exposure to 0⁻200 ppm of selected volatile organic compounds (acetone, ethanol, and methanol) that are of high interest in industry and biomedical applications. The highest responses to acetone were obtained for CuO-based gas sensors, to ethanol for SnO₂-based gas sensors, while for methanol detection both dioxides, SnO₂ and TiO₂, exhibited good sensitivity.

SUBMITTER: Rydosz A 

PROVIDER: S-EPMC6471264 | biostudies-literature | 2019 Mar

REPOSITORIES: biostudies-literature