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Carrier control in 2D transition metal dichalcogenides with Al2O3 dielectric.


ABSTRACT: We report transport measurements of dual gated MoS2 and WSe2 devices using atomic layer deposition grown Al2O3 as gate dielectrics. We are able to achieve current pinch-off using independent split gates and observe current steps suggesting possible carrier confinement. We also investigated the impact of gate geometry and used electrostatic potential simulations to explain the observed device physics.

SUBMITTER: Lau CS 

PROVIDER: S-EPMC6584693 | biostudies-literature | 2019 Jun

REPOSITORIES: biostudies-literature

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Carrier control in 2D transition metal dichalcogenides with Al<sub>2</sub>O<sub>3</sub> dielectric.

Lau Chit Siong CS   Chee Jing Yee JY   Thian Dickson D   Kawai Hiroyo H   Deng Jie J   Wong Swee Liang SL   Ooi Zi En ZE   Lim Yee-Fun YF   Goh Kuan Eng Johnson KEJ  

Scientific reports 20190619 1


We report transport measurements of dual gated MoS<sub>2</sub> and WSe<sub>2</sub> devices using atomic layer deposition grown Al<sub>2</sub>O<sub>3</sub> as gate dielectrics. We are able to achieve current pinch-off using independent split gates and observe current steps suggesting possible carrier confinement. We also investigated the impact of gate geometry and used electrostatic potential simulations to explain the observed device physics. ...[more]

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