Improved electrical performance of a sol-gel IGZO transistor with high-k Al₂O₃ gate dielectric achieved by post annealing.

ABSTRACT: We have explored the effect of post-annealing on the electrical properties of an indium gallium zinc oxide (IGZO) transistor with an Al₂O₃ bottom gate dielectric, formed by a sol-gel process. The post-annealed IGZO device demonstrated improved electrical performance in terms of threshold variation, on/off ratio, subthreshold swing, and mobility compared to the non-annealed reference device. Capacitance-voltage measurement confirmed that annealing can lead to enhanced capacitance properties due to reduced charge trapping. Depth profile analysis using X-ray photoelectron spectroscopy proved that percentage of both the oxygen vacancy (V_O) and the hydroxyl groups (M-OH) within the IGZO/Al₂O₃ layers, which serve as a charge trapping source,

SUBMITTER: Lee E 

PROVIDER: S-EPMC6643007 | biostudies-literature | 2019 Jul

REPOSITORIES: biostudies-literature