Effects of carbon concentration on high-hardness plasma-polymer-fluorocarbon film deposited by mid-range frequency sputtering.

ABSTRACT: We propose a method for fabricating high-hardness plasma-polymer-fluorocarbon (PPFC) thin films with controllable optical and surface properties via manipulation of the target composition design and sputtering power density. The carbon/polytetrafluoroethylene (PTFE) composite polymeric material targets with the low electrical resistance were prepared by press-molding using a mechanically mixed powder of PTFE, carbon nanotubes, and graphite. The composite targets showed electrical sheet resistances of 0.1-100 Ω/sq. PPFC thin films were deposited by mid-range frequency (MF) sputtering at power densities within 0.62~4.92 W/cm². The maximum surface hardness of the PPFC thin film was 4.75 GPa, which was 21.6 times higher than that of fluorocarbon thin film sputtered from PTFE under t

SUBMITTER: Kim SH 

PROVIDER: S-EPMC6650446 | biostudies-literature | 2019 Jul

REPOSITORIES: biostudies-literature