Translational MEMS Platform for Planar Optical Switching Fabrics.

ABSTRACT: While 3-D microelectromechanical systems (MEMS) allow switching between a large number of ports in optical telecommunication networks, the development of such systems often suffers from design, fabrication and packaging constraints due to the complex structures, the wafer bonding processes involved, and the tight alignment tolerances between different components. In this work, we present a 2-D translational MEMS platform capable of highly efficient planar optical switching through integration with silicon nitride (SiN) based optical waveguides. The discrete lateral displacement provided by simple parallel plate actuators on opposite sides of the central platform enables switching between different input and output waveguides. The proposed structure can displace the central platform by 3.37

SUBMITTER: Sharma S 

PROVIDER: S-EPMC6680699 | biostudies-literature | 2019 Jun

REPOSITORIES: biostudies-literature