Scaled-Down c-Si and c-SiGe Wagon-Wheels for the Visualization of the Anisotropy and Selectivity of Wet-Chemical Etchants.

ABSTRACT: Wet etching offers an advantage as a soft, damage-less method to remove sacrificial material with close to nanometer precision which has become critical for the fabrication of nanoscale structures. In order to develop such wet etching solutions, screening of etchant properties like selectivity and (an)isotropy has become vital. Since these etchants typically have low etch rates, sensitive test structures are required to evaluate their etching behavior. Therefore, scaled-down single-crystalline Si (c-Si) and SiGe (c-SiGe) wagon-wheels were fabricated. First, the sensitivity of the c-Si wagon-wheels to detect anisotropic behavior of crystalline silicon in the alkaline etchants TMAH and NH₄OH was demonstrated. Distinctive wagon-wheel patterns, characteristic for each material/etcha

SUBMITTER: Pacco A 

PROVIDER: S-EPMC6701794 | biostudies-literature | 2019 Aug

REPOSITORIES: biostudies-literature