Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon.

ABSTRACT: We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (>10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimiz

SUBMITTER: Yadavali S 

PROVIDER: S-EPMC6704095 | biostudies-literature | 2019 Aug

REPOSITORIES: biostudies-literature