TOF-SIMS Analysis Using Bi₃ ⁺ as Primary Ions on Au Nanoparticles Supported by SiO₂/Si: Providing Insight into Metal-Support Interactions.

ABSTRACT: Au nanoparticles with a mean diameter of 20 nm with a coverage of ∼20% of the surface were distributed on a Si wafer surface and studied both before and after being annealed (at 100 and 300 °C). The two types of samples were analyzed using secondary ion mass spectroscopy (SIMS) with Bi₃ ⁺ clusters as the primary ions combined with surface etching using Ar₁₀₀₀ ⁺ clusters. We observed a substantial difference in the SIMS spectra combined with a relatively short sputtering time of Ar₁₀₀₀ ⁺. In the nonannealed samples, bare Au cluster cations and Si⁺ were observed in the SIMS spectra; AuSi⁺ clusters were also observed in the annealed samples. These results indicate Au-silicide formation at a part of the per

SUBMITTER: Kim IH 

PROVIDER: S-EPMC6705091 | biostudies-literature | 2019 Aug

REPOSITORIES: biostudies-literature