FIB-Milled Quartz Nanopores in a Sealed Nanopipette.

ABSTRACT: We report the use of laser-pulled quartz nanopipettes as a new platform for microfabricated nanopores. A quartz nanopipette is prepared on a laser puller and sealed closed prior to focused-ion beam (FIB) milling. A quartz nanopore can then be FIB-milled into the side walls of the sealed pipette and used to analyze single nanoparticles. This method is fast, reproducible and creates nearly cylindrical nanopores in ultrathin quartz walls with controllable diameter down to 66 nm. Both pore size and wall thickness can be readily controlled in the FIB milling process by adjusting milling parameters and milling at different locations along the pipette walls. FIB-milled quartz nanopores combine the advantages of the pipette pores and silicon chip-based membrane pores into one device while a

SUBMITTER: Gunderson CG 

PROVIDER: S-EPMC6707750 | biostudies-literature | 2019 Jan

REPOSITORIES: biostudies-literature