Synthesis and Characterization of Tungsten Nitrido Amido Guanidinato Complexes as Precursors for Chemical Vapor Deposition of WN_xC_y Thin Films.

ABSTRACT: Tungsten nitrido amido guanidinato complexes of the type WN(NR₂)[(NR')₂C(NR₂)]₂ (R = Me, Et_; R' = ⁱ Pr, Cy) were synthesized as precursors for aerosol-assisted chemical vapor deposition (AACVD) of WN_xC_y thin films. The reaction of tungsten nitrido amido complexes of the type WN(NR₂)₃ (R = Me, Et) with two equivalents of a carbodiimide R'N=C=NR' (R' = ⁱ Pr, Cy) resulted in two insertions of a carbodiimide into W-N(amido) bonds, affording bis(guanidinato) amido nitrido tungsten complexes. These compounds were characterized by ¹⁴N NMR, indicating distinctive chemical shifts for each type of N-bound ligand. Crystallographic structure determina

SUBMITTER: Nolan MM 

PROVIDER: S-EPMC6715305 | biostudies-literature | 2018 Jan

REPOSITORIES: biostudies-literature