Tuning the Electrical and Thermoelectric Properties of N Ion Implanted SrTiO₃ Thin Films and Their Conduction Mechanisms.

ABSTRACT: The SrTiO₃ thin films were fabricated by pulsed laser deposition. Subsequently ion implantation with 60 keV N ions at two different fluences 1 × 10¹⁶ and 5 × 10¹⁶ ions/cm² and followed by annealing was carried out. Thin films were then characterized for electronic structure, morphology and transport properties. X-ray absorption spectroscopy reveals the local distortion of TiO₆ octahedra and introduction of oxygen vacancies due to N implantation. The electrical and thermoelectric properties of these films were measured as a function of temperature to understand the conduction and scattering mechanisms. It is observed that the electrical conductivity and Seebeck coefficient (S) of these films are significantly enhanced for higher N ion f

SUBMITTER: Bhogra A 

PROVIDER: S-EPMC6785559 | biostudies-literature | 2019 Oct

REPOSITORIES: biostudies-literature