Pyrolysis-induced shrinking of three-dimensional structures fabricated by two-photon polymerization: experiment and theoretical model.

ABSTRACT: The introduction of two-photon polymerization (TPP) into the area of Carbon Micro Electromechanical Systems (C-MEMS) has enabled the fabrication of three-dimensional glassy carbon nanostructures with geometries previously unattainable through conventional UV lithography. Pyrolysis of TPP structures conveys a characteristic reduction of feature size-one that should be properly estimated in order to produce carbon microdevices with accuracy. In this work, we studied the volumetric shrinkage of TPP-derived microwires upon pyrolysis at 900 °C. Through this process, photoresist microwires thermally decompose and shrink by as much as 75%, resulting in glassy carbon nanowires with linewidths between 300 and 550 nm. Even after the thermal decomposition induced by the pyrolysis step, the linewidth

SUBMITTER: Cardenas-Benitez B 

PROVIDER: S-EPMC6799819 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature