Optically read Coriolis vibratory gyroscope based on a silicon tuning fork.

ABSTRACT: In this work, we describe the design, fabrication, and characterization of purely mechanical miniature resonating structures that exhibit gyroscopic performance comparable to that of more complex microelectromechanical systems. Compared to previous implementations of Coriolis vibratory gyroscopes, the present approach has the key advantage of using excitation and probing that do not require any on-chip electronics or electrical contacts near the resonating structure. More specifically, our design relies on differential optical readout, each channel of which is similar to the "optical lever" readout used in atomic force microscopy. The piezoelectrically actuated stage provides highly efficient excitation of millimeter-scale tuning fork structures that were fabricated using widely available

SUBMITTER: Lavrik NV 

PROVIDER: S-EPMC6803679 | biostudies-literature | 2019

REPOSITORIES: biostudies-literature