Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators.

ABSTRACT: Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic lateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling stre

SUBMITTER: Zhou X 

PROVIDER: S-EPMC6823415 | biostudies-literature | 2019 Oct

REPOSITORIES: biostudies-literature