Stress-controlled decomposition routes in cubic AlCrN films assessed by in-situ high-temperature high-energy grazing incidence transmission X-ray diffraction.

ABSTRACT: The dependence of decomposition routes on intrinsic microstructure and stress in nanocrystalline transition metal nitrides is not yet fully understood. In this contribution, three Al_0.7Cr_0.3N thin films with residual stress magnitudes of -3510, -4660 and -5930 MPa in the as-deposited state were in-situ characterized in the range of 25-1100 °C using in-situ synchrotron high-temperature high-energy grazing-incidence-transmission X-ray diffraction and temperature evolutions of phases, coefficients of thermal expansion, structural defects, texture as well as residual, thermal and intrinsic stresses were evaluated. The multi-parameter experimental data indicate a complex intrinsic stress and phase changes governed by a microstructure recovery and phase transformations taki

SUBMITTER: Meindlhumer M 

PROVIDER: S-EPMC6888894 | biostudies-literature | 2019 Dec

REPOSITORIES: biostudies-literature