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Solar-Blind UV Photodetector Based on Atomic Layer-Deposited Cu2O and Nanomembrane β-Ga2O3 pn Oxide Heterojunction.

ABSTRACT: Herein, we present a solar-blind ultraviolet photodetector realized using atomic layer-deposited p-type cuprous oxide (Cu2O) underneath a mechanically exfoliated n-type β-gallium oxide (β-Ga2O3) nanomembrane. The atomic layer deposition process of the Cu2O film applies bis(N,N'-di-secbutylacetamidinato)dicopper(I) [Cu(5Bu-Me-amd)]2 as a novel Cu precursor and water vapor as an oxidant. The exfoliated β-Ga2O3 nanomembrane was transferred to the top of the Cu2O layer surface to realize a unique oxide pn heterojunction, which is not easy to realize by conventional oxide epitaxy techniques. The current-voltage (I-V) characteristics of the fabricated pn heterojunction diode show the typical rectifying behavior. The fabricated Cu2O/β-Ga2O3 photodetector achieves sensitive detection of current at the picoampere scale in the reverse mode. This work provides a new approach to integrate all oxide heterojunctions using membrane transfer and bonding techniques, which goes beyond the limitation of conventional heteroepitaxy.

SUBMITTER: Bae H 

PROVIDER: S-EPMC6906937 | biostudies-literature | 2019 Dec

REPOSITORIES: biostudies-literature

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Solar-Blind UV Photodetector Based on Atomic Layer-Deposited Cu<sub>2</sub>O and Nanomembrane β-Ga<sub>2</sub>O<sub>3</sub> pn Oxide Heterojunction.

Bae Hagyoul H   Charnas Adam A   Sun Xing X   Noh Jinhyun J   Si Mengwei M   Chung Wonil W   Qiu Gang G   Lyu Xiao X   Alghamdi Sami S   Wang Haiyan H   Zemlyanov Dmitry D   Ye Peide D PD  

ACS omega 20191122 24

Herein, we present a solar-blind ultraviolet photodetector realized using atomic layer-deposited p-type cuprous oxide (Cu<sub>2</sub>O) underneath a mechanically exfoliated n-type β-gallium oxide (β-Ga<sub>2</sub>O<sub>3</sub>) nanomembrane. The atomic layer deposition process of the Cu<sub>2</sub>O film applies bis(<i>N</i>,<i>N</i>'-di-secbutylacetamidinato)dicopper(I) [Cu(<sup>5</sup>Bu-Me-amd)]<sub>2</sub> as a novel Cu precursor and water vapor as an oxidant. The exfoliated β-Ga<sub>2</sub>  ...[more]

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