Controlled Focused Ion Beam Milling of Composite Solid State Nanopore Arrays for Molecule Sensing.

ABSTRACT: Various nanoscale fabrication techniques are elaborated to form artificial nanoporous/nanochannel membranes to be applied for biosensing: one of the most prevalent is the micro-electromechanical systems (MEMS) compatible focused ion beam (FIB) milling. This technique can be easily adopted in micro- and nanomachining process sequences to develop composite multi-pore structures, although its precision and reproducibility are key points in the case of these thick multi-layered membranes. This work is to demonstrate a comprehensive characterisation of FIB milling to improve the reliability of the fabrication of solid state nanopore arrays with precisely predetermined pore geometries for a targeted molecule type to be recognised. The statistical geometric features of the fabricated nanopores we

SUBMITTER: Furjes P 

PROVIDER: S-EPMC6915623 | biostudies-literature | 2019 Nov

REPOSITORIES: biostudies-literature