Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition.

ABSTRACT: Degenerately doped ZnO is seen as a potential substitute to the ubiquitous and expensive Sn doped In₂O₃ as a transparent electrode in optoelectronic devices. Here, highly conductive and transparent Ga doped ZnO thin films were grown via aerosol assisted chemical vapor deposition. The lowest resistivity (7.8 × 10^-4 Ω.cm) and highest carrier concentration (4.23 × 10²⁰ cm^-3) ever reported for AACVD grown ZnO: Ga was achieved due to using oxygen poor growth conditions enabled by diethylzinc and triethylgallium precursors.

SUBMITTER: Ponja SD 

PROVIDER: S-EPMC6971236 | biostudies-literature | 2020 Jan

REPOSITORIES: biostudies-literature