Error Analysis and Modeling for an Absolute Capacitive Displacement Measuring System with High Accuracy and Long Range.

ABSTRACT: We proposed a novel kind of absolute capacitive grating displacement measuring system with both high accuracy and long range in a previous article. The measuring system includes both a MOVER and a STATOR, the contact surfaces of which are coated by a thin layer of dielectric film with a low friction coefficient and high hardness. The measuring system works in contact mode to minimize the gap changes. This paper presents a theoretical analysis of the influence of some factors, including fabrication errors, installation errors, and environment disturbance, on measurement signals. The measuring signal model was modified according to the analysis. The signal processing methods were investigated to improve the signal sensitivity and signal-to-noise ratio (SNR). The displacement calculation mode

SUBMITTER: Zhang D 

PROVIDER: S-EPMC6994968 | biostudies-literature | 2019 Dec

REPOSITORIES: biostudies-literature