Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (∊₀₄₄) and tilt of suspended monolithic silicon nanowire structures.

ABSTRACT: Silicon nanowire-based sensors find many applications in micro- and nano-electromechanical systems, thanks to their unique characteristics of flexibility and strength that emerge at the nanoscale. This work is the first study of this class of micro- and nano-fabricated silicon-based structures adopting the scanning X-ray diffraction microscopy technique for mapping the in-plane crystalline strain (∊₀₄₄) and tilt of a device which includes pillars with suspended nanowires on a substrate. It is shown how the micro- and nanostructures of this new type of nanowire system are influenced by critical steps of the fabrication process, such as electron-beam lithography and deep reactive ion etching. X-ray analysis performed on the 044 reflection shows a very low level of lattice strain (

SUBMITTER: Dolabella S 

PROVIDER: S-EPMC6998783 | biostudies-literature | 2020 Feb

REPOSITORIES: biostudies-literature