Performance improvement in electrospun InGaZnO nanofibres field-effect-transistors using low thermal budget microwave calcination and Ar/O₂ mixed-plasma surface treatment.

ABSTRACT: In this study, we present a low thermal budget microwave annealing (MWA) method for calcination of electrospun In-Ga-ZnO (IGZO) nanofibres and demonstrate an improvement in the performance of IGZO nanofibre field-effect transistors (FETs) by Ar/O₂ mixed-plasma surface treatment. The IGZO nanofibres were fabricated by electrospinning method and calcined using MWA method. This process allowed for a significant reduction in the heat treatment temperature and time. Subsequently, plasma surface treatment using various ratios of Ar/O₂ gas mixtures was carried out. The surface morphology and chemical composition of MWA-calcined and plasma-treated IGZO nanofibres were studied by SEM and XPS analysis. In order to investigate the effects of MWA calcination combined with Ar/O

SUBMITTER: Cho SK 

PROVIDER: S-EPMC7046654 | biostudies-literature | 2020 Feb

REPOSITORIES: biostudies-literature