Dataset for additional information on the evaluation of thermal properties of thin films by IR radiometry using a comprehensive set of Zr-O-N thin films.

ABSTRACT: This paper provides additional negative data regarding the paper Evaluation of thermal properties of thin films by IR radiometry using a comprehensive set of Zr-O-N thin films [1]. In that paper, a matrix of samples was prepared to evaluate the so-called Extremum method for the analysis of Infrared (IR) radiometry data. Such matrix was composed by 3 types of films with 4 different thickness in 3 types of substrates, totalizing 36 samples in total. The data of this paper can be divided into three separate categories: i) lack of adhesion of the films deposited on Teflon, simultaneously to the films deposited on other substrates. ii) Improvement of the signal and signal-to-noise ratio on samples that did not present an extremum (minimum or maximum) using the initial (more conventional)

SUBMITTER: da Silva-Oliveira CI 

PROVIDER: S-EPMC7049593 | biostudies-literature | 2020 Apr

REPOSITORIES: biostudies-literature