A highly CMOS compatible hafnia-based ferroelectric diode.

ABSTRACT: Memory devices with high speed and high density are highly desired to address the 'memory wall' issue. Here we demonstrated a highly scalable, three-dimensional stackable ferroelectric diode, with its rectifying polarity modulated by the polarization reversal of Hf_0.5Zr_0.5O₂ films. By visualizing the hafnium/zirconium lattice order and oxygen lattice order with atomic-resolution spherical aberration-corrected STEM, we revealed the correlation between the spontaneous polarization of Hf_0.5Zr_0.5O₂ film and the displacement of oxygen atom, thus unambiguously identified the non-centrosymmetric Pca2₁ orthorhombic phase in Hf_0.5Zr_0.5O₂ film. We further implemented this ferroelectric diode

SUBMITTER: Luo Q 

PROVIDER: S-EPMC7070068 | biostudies-literature | 2020 Mar

REPOSITORIES: biostudies-literature