Deposition Rate Effect on Optical and Electrical Properties of Thermally Evaporated WO_3-x/Ag/WO_3-x Multilayer Electrode for Transparent and Flexible Thin Film Heaters.

ABSTRACT: We investigated the deposition rate effect on the optical, electrical, and morphological characteristics of thermally evaporated WO_3-x/Ag/WO_3-x (WAW) multilayer electrodes. By controlling the deposition rate of the WO_3-x and Ag layers, we can control the interface structure between WO_3-x and Ag and improve both the optical and electrical properties of the thermally evaporated WAW multilayer electrodes. At the optimized deposition rate of WO_3-x (2.5 Å/sec) and Ag (10 Å/sec), the symmetric WAW multilayer exhibited a high optical transmittance of 92.16% at a 550 nm wavelength and low sheet resistance of 3.78 Ω/square. During repeated bending, rolling, and twisting, there was no resistance change indicating the superior flexibility of WAW

SUBMITTER: Lim SH 

PROVIDER: S-EPMC7239933 | biostudies-literature | 2020 May

REPOSITORIES: biostudies-literature