Significant improvement of spray pyrolyzed ZnO thin film by precursor optimization for high mobility thin film transistors.

ABSTRACT: Metal-oxide thin-film transistors (TFT) fabricated by spray pyrolysis are of increasing interest because of its simple process and scalability. A bottleneck issue is to get a bubble-free and dense material. We studied the effect of ammonium acetate (AA) addition in the oxide precursor solution on the performance of spray-coated ZnO TFTs. AA acts as a stabilizer, which increases the solubility of the solution and enhances the film quality by reducing the defects. With AA addition in ZnO precursor, the films are coffee ring free with high mass density and better grain orientation. The ZnO TFT with AA exhibit a remarkable improvement of its device performance such as saturation mobility increasing from 5.12 to 41.53 cm²V^-1s^-1, the subthreshold swing decreasing

SUBMITTER: Saha JK 

PROVIDER: S-EPMC7265479 | biostudies-literature | 2020 Jun

REPOSITORIES: biostudies-literature