Bidirectional Linear Motion by Travelling Waves on Legged Piezoelectric Microfabricated Plates.

ABSTRACT: This paper reports the design, fabrication and performance of MEMS-based piezoelectric bidirectional conveyors featuring 3D printed legs, driven by linear travelling waves (TW). The structures consisted of an aluminium-nitride (AlN) piezoelectric film on top of millimetre-sized rectangular thin silicon bridges and two electrode patches. The position and size of the patches were analytically optimised for TW generation in three frequency ranges: 19, 112 and 420 kHz, by the proper combination of two contiguous flexural modes. After fabrication, the generated TW were characterized by means of Laser-Doppler vibrometry to obtain the relevant tables of merit, such as the standing wave ratio and the average amplitude. The experimental results agreed with the simulation, showing the generation of

SUBMITTER: Ruiz-Diez V 

PROVIDER: S-EPMC7281763 | biostudies-literature | 2020 May

REPOSITORIES: biostudies-literature