Nanoindentation dataset of silicon and hafnia doped silicon coatings produced by magnetron sputtering.

ABSTRACT: Mechanical properties of three different coatings comprising of pure silicon, 36 mol% HfO₂-doped silicon and 60 mol% HfO₂-doped silicon on SiC substrate material were obtained by nanoindentation. The coatings aim at oxidation protective layers in environmental barrier coating systems for SiC/SiC ceramic matrix composites (CMC). The examined coatings were produced by physical vapour deposition (magnetron sputtering) and have been tested under cycling conditions between room temperature and 1523 K until 100 h accumulated hot time. In order to measure the hardness and the reduced Young's modulus, a Berkovich tip has been used with a constant depth modulus of 100 nm and 160 nm. Two depth moduli have been chosen to investigate a possible volume impact on the mechanical pro

SUBMITTER: Anton R 

PROVIDER: S-EPMC7306585 | biostudies-literature | 2020 Aug

REPOSITORIES: biostudies-literature