Low-Cost PVD Shadow Masks with Submillimeter Resolution from Laser-Cut Paper.

ABSTRACT: We characterize an affordable method of producing stencils for submillimeter physical vapor deposition (PVD) by using paper and a benchtop laser cutter. Patterning electrodes or similar features on top of organic or biological substrates is generally not possible using standard photolithography. Shadow masks, traditionally made of silicon-based membranes, circumvent the need for aggressive solvents but suffer from high costs. Here, we evaluate shadow masks fabricated by CO₂ laser processing from quantitative filter papers. Such papers are stiff and dimensionally stable, resilient in handling, and cut without melting or redeposition. Using two exemplary interdigitated electrode designs, we quantify the line resolution achievable with both high-quality and standard lenses, as well

SUBMITTER: Elhami Nik F 

PROVIDER: S-EPMC7407583 | biostudies-literature | 2020 Jul

REPOSITORIES: biostudies-literature