Macroscopic Alignment of Block Copolymers on Silicon Substrates by Laser Annealing.

ABSTRACT: Laser annealing is a competitive alternative to conventional oven annealing of block copolymer (BCP) thin films enabling rapid acceleration and precise spatial control of the self-assembly process. Localized heating by a moving laser beam (zone annealing), taking advantage of steep temperature gradients, can additionally yield aligned morphologies. In its original implementation it was limited to specialized germanium-coated glass substrates, which absorb visible light and exhibit low-enough thermal conductivity to facilitate heating at relatively low irradiation power density. Here, we demonstrate a recent advance in laser zone annealing, which utilizes a powerful fiber-coupled near-IR laser source allowing rapid BCP annealing over a large area on conventional silicon wafers. The annealin

SUBMITTER: Leniart AA 

PROVIDER: S-EPMC7497666 | biostudies-literature | 2020 Apr

REPOSITORIES: biostudies-literature